1

Epitaxial silicide formation by electron beam annealing of nickel thin films

Year:
1984
Language:
english
File:
PDF, 501 KB
english, 1984
3

Transient electron beam annealing of arsenic implanted silicon

Year:
1987
Language:
english
File:
PDF, 401 KB
english, 1987
4

High temperature failure of protective layers on silicon substrates in vacuum

Year:
1988
Language:
english
File:
PDF, 1.08 MB
english, 1988